High Performance Power Supplies for Plasma Materials Processing
نویسندگان
چکیده
Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21 st century. All these different everyday objects have one thing in common - they manufactured using plasma processing techniques. The aim this paper is to introduce silent hero modern industry, a broader audience. An evaluation made types power converters within scope applications, while key requirements future challenges for such supplies discussed.
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ژورنال
عنوان ژورنال: IEEE Access
سال: 2021
ISSN: ['2169-3536']
DOI: https://doi.org/10.1109/access.2021.3054051